Latest Advances in Trace Detection in Electronic Specialty Gases using Cavity Ring-Down Spectroscopy
Description:
The manufacturing of semiconductor devices utilizes numerous gaseous raw materials. Aside from bulk gases such as N2, O2 and Ar, specialty gases serve an important role for various processes. Among the most important gases are carbon dioxide (CO2), nitrous oxide (N2O), and ammonia (NH3). Trace analysis in bulk gases can take advantage of many analytical solutions, including Cavity Ring-Down Spectroscopy (CRDS), which is known for its high sensitivity, user-friendliness and low operating costs. Detecting impurities in specialty gases, however, is often much more complex due to the gases’ chemical properties and possible background interference. This often rules out certain techniques or limits their sensitivity to levels not suitable for the industry’s high purity requirements. Due to its reliance on narrow-bandwidth lasers, CRDS is one technique that can offer an excellent combination of sensitivity and selectivity in many specialty gases. In addition, chemical properties are typically not an issue due to the non-contact nature of the measurement. CRDS has been used in the industry to detect primarily H2O in specialty gases for many years, including for CO2, N2O and NH3, although the spectroscopic detection is certainly not limited to H2O detection. The industry’s ongoing shift towards lower detection limits and lower operating cost opens the opportunity for CRDS to expand its use to additional analytes, background gases, and applications. To offer suitable and more complete CRDS measurement solutions and meet industry demand, Tiger Optics has put a focus on developing specialty gas capabilities beyond moisture detection in recent years. Here, we present some of the latest developments, both based on existing and new platforms: ppb-level detection of CH4 and N2O in CO2, detection of trace CO2 in N2O, and sub-ppb detection of CO and CO2 in NH3. The latter uses a newly developed mid-IR platform employing Quantum Cascade Lasers (QCLs) to maximize detection sensitivity.
Speaker: Florian Adler - Tiger Optics
Dr. Florian Adler is a Lead Scientist & Technical Product Manager at Tiger Optics and has been with the company since 2012. Florian's main responsibilities are various marketing and market research activities to help guide the company’s development of new technologies and new products to serve existing and emerging markets. He also serves as lead developer on various R&D projects.
Co-Authors
Latest Advances in Trace Detection in Electronic Specialty Gases using Cavity Ring-Down Spectroscopy
Category
2023 Call for Invited Abstracts
Description
Session Number: O10-01
Session Type: Organized Contributed
Session Date: Monday 3/20/2023
Session Time: 1:30 PM - 4:25 PM
Room Number: 120B
Track: Industry & Manufacturing
Category: Industry/Manufacturing, Molecular Spectroscopy, Process Analytical Techniques
Register for Pittcon 2023