Investigation and Evaluation of Columns for the Analysis of Hydride Impurities in Various Electronic Gases and Hydrocarbon Gases

Description:
Over the years we have used an assortment of chromatographic columns for determining trace hydride gas impurities in both electronic/semi-conductor gases as well as hydrocarbon gases. The typical impurities are silane, germane, phosphine, hydrogen sulfide and arsine. These can be problematic in other hydride gases as well as hydrocarbon gases that are used for the manufacture of polymers. This presentation discusses columns that we have used, and newer column sets that we are evaluating in terms of ‘transmission’, ease of use, and speed.

Speaker: William Geiger - CONSCI, Ltd.
Mr. Geiger is a co-founder of CONSCI, Ltd. and has been a leading provider of independent specialty gas testing services since 1988. He has over three decades of experience in everything from advanced R&D project consulting to routine quality tests. Analytical skills range from gas chromatography, mass spectrometry, and Fourier Transform Infrared to ICP-MS analysis. His current interest is those analytical solutions that are focused on semi-conductor precursors particularly the use of GC-ICP-MS. He has published numerous articles on gas chromatography and has contributed or edited several book chapters.